7. Gaskorrektur-Tabelle

 MASS FLOWMETER - GASKORREKTUR-TABELLE

Pos.#	GCF	Symbol	Gas
0	1.00	Customer
1	x.xx	User	Special Gas Mixture
2	1.00	Air	Luft
3	0.73	NH3	Ammonia
4	1.45	Ar	Argon
5	0.67	AsH3	Arsine
6	0.41	BCl3	Boron Trichloride
7	0.81	Br2	Bromine
8	0.74	CO2	Carbon Dioxide
9	1.00	CO	Carbon Monoxide
10	0.31	CCl4	Carbon Tetrachloride
11	0.42	CF4	Carbon Tetrafluoride-Freon 14
12	0.86	Cl2	Chlorine
13	0.46	CHClF2	Freon 21
14	0.24	C2ClF5	Freon 115
15	0.38	CClF3	Chlorotrifluormethan-Freon 13
16	0.61	C2N2	Cyanogen
17	1.00	D2	Deuterium
18	0.44	B2H6	Diborane
19	0.19	CBr2F2	Dibromodifluoromethane
20	0.35	CCl2F2	Diclorodifluoromethane
21	0.42	CHCl2F	Diclorofluoromethane
22	0.25	C2H6SiCl2	Dicloromethylsilane
23	0.40	SiH2Cl2	Diclorosilane
24	0.22	C2Cl2F4	Diclorotetrafluoroethane
25	0.43	C2H2F2	Difluoroethylene
26	0.22	C5H12	Dimethylpropan
27	0.50	C2H6	Ethane
28	0.98	F2	Fluorine
29	0.50	CHF3	Fluoroform - Freon 23
30	0.33	CCl3F	Freon 11
31	0.35	CCl2F2	Freon 12
32	0.38	CClF3	Freon 13
33	0.37	CBrF3	Freon 13 B1
34	0.42	CF4	Freon 14
35	0.42	CHCl2F	Freon 21
36	0.46	CHClF2	Freon 22
37	0.50	CHF3	Freon 23
38	0.20	C2Cl3F3	Freon 113
39	0.22	C2Cl2F4	Freon 114
40	0.24	C2ClF5	Freon 115
41	0.24	C2F6	Freon 116
42	0.17	C4F8	Freon C318
43	0.43	C2H2F2	Freon 1132A
44	1.45	He	Helium
45	0.24	C2F6	Hexafluoroethane-Freon 116
46	1.01	H2	Hydrogen
47	1.00	HBr	Hydrogen Bromide
48	1.00	HCl	Hydrogen Chloride
49	1.00	HF	Hydrogen Fluoride
50	0.29	C4H8	Isobutylene
51	1.54	Kr	Krypton
52	0.72	CH4	Methane
53	0.56	CH3F	Methyl Fluoride
54	0.21	MoF6	Molybdenum Hexafluoride
55	1.46	Ne	Neon
56	0.99	NO	Nitric Oxide
57	1.00	N2	Nitrogen
58	0.74	NO2	Nitrogen Dioxide
59	0.48	NF3	Nitrogen Trifluoride
60	0.71	N2O	Nitrous Oxide
61	0.17	C4F8	Octofluorocyclobutane
62	1.00	O2	Oxygen
63	0.21	C5H12	Pentane
64	0.17	C3F8	Perfluoropropane
65	0.44	COCl2	Phosgene
66	0.76	PH3	Phosphine
67	0.36	C3H8	Propane
68	0.41	C3H6	Propylene
69	0.60	SiH4	Silane
70	0.28	SiCl4	Silicon Tetrachloride
71	0.35	SiF4	Silicon Tetrafluoride
72	0.69	SO2	Sulfur Dioxide
73	0.26	SF6	Sulfur Hexafluoride
74	0.33	CCl3F	Trichlorofluoromethane
75	0.33	SiHCl3	Trichlorosilane
76	0.25	WF6	Tungsten Hexafluoride
77	1.32	Xe	Xenon